The physics of sputtering

Stocker, B. J. (1962) The physics of sputtering. Masters thesis, Northern Polytechnic.

Stocker-BJ_1962_The-Physics-of-Sputtering.pdf - Published Version

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Abstract / Description

Early sputtering observations were made in the abnormal glow discharge at pressures around 1 mm Hg and indicated that the mass sputtered per unit charge passed through the discharge tube varied linearly with the cathode fall of potential.

Item Type: Thesis (Masters)
Uncontrolled Keywords: physics of sputtering; glow discharges; magnetic fields
Subjects: 500 Natural Sciences and Mathematics > 530 Physics
Department: Library Services and Special Collections
Depositing User: Mary Burslem
Date Deposited: 07 Oct 2021 11:19
Last Modified: 21 Oct 2021 10:13


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